Yang Feng

Recipient: Yang Feng

Paper Title:  Record 2Pr (>38 μC/cm² at 0.5 V, >28 μC/cm² at 0.4 V) of 3D MFM Capacitors Enabled by 3 nm HZO and ALD-TiN Orientation Engineering

Authors: Yang Feng^1,2*, Xiaolin Wang^1*, Yaoyu He², Leming Jiao¹, Jingguang Lu¹, Hanjie Li¹, Jiawei Xie¹, Zhilun Zhang¹, Dong Zhang¹, Xiaopeng Li², Wei Shi¹, Zijie Zheng¹, Chen Sun¹, Umesh Chand³, Akhil Ranjan³, Chien Yu-Chieh³, Jixuan Wu², Jiezhi Chen² and Xiao Gong^1,3

Affiliation: ¹ECE, National University of Singapore, Singapore; ²School of Information Science and Engineering, Shandong University, China; ³Institute of Microelectronics (IME), A*STAR; ^*Equally contributed;