Sponsored by the Japan Society of Applied Physics and the IEEE Electron Devices Society
In Cooperation with the IEEE Solid-State Circuits Society


Rihga Royal Hotel Kyoto
Kyoto, Japan
June 15 - 17, 2009

The 2009 Symposium on VLSI Technology welcomes the submission of papers on all aspects of VLSI technology. Not only the technical fields of More Moore and More than Moore but also Explorative Research (the basic researches on Advanced Device-Analysis, Materials and Modeling) and Beyond CMOS are to be covered.

INSPIRING SESSIONS (Special Sessions and Focus Session)

Two special sessions (Regular and Invited papers) on “Explorative Research” and “Beyond CMOS” are going to be established. For the “Explorative Research” session, the original papers related to advanced device-analysis, materials and modeling for VLSIs are very welcome. For the “Beyond CMOS” session, the original papers related to new functional devices beyond CMOS with a path for VLSI implementation are very welcome. Furthermore, focus session regarding “3D-system integration” (Invited papers) will be established on this occasion.

The scope of the symposium is being expanded into innovative areas such as:

- New concepts and breakthroughs in VLSI processes and devices including Memory, Logic, I/O, and I/F (RF/Analog/Mixed-Signal/High-Voltage, Imager, MEMS, etc.)

- Advanced gate stacks and interconnects in VLSI processes and devices

- Advanced lithography and fine-patterning technologies for high-density VLSI

- New functional devices beyond CMOS with a path for VLSI implementation

- Packing of VLSI devices including 3D-system integration

- Process and device modeling of VLSI devices

- Reliability related to the above devices

- Theories and fundamentals related to the above devices

- New concepts and technologies for VLSI manufacturing


Prospective authors must submit papers in the format of two pages of camera-ready copy to the Author's Guide page:

Please note that hard copy submission will NOT be accepted.

Those interested in submitting papers should access the above website.
The papers are to be submitted in final form and, if accepted, will be published as submitted.

To improve the probability for acceptance of a submitted paper, the paper should describe original work with specific results from experiments or simulations. The technical content beyond the abstract of the accepted paper must not be announced, published, or in any way put in the public domain prior to the Symposium.

Submissions from universities are encouraged. Partial travel expense support for students who are presenting papers is available upon request.

The selection will be based upon the quality of the written paper and the presentation. The student who receives the Best Student Paper Award will be presented a monetary award and a certificate at the opening session of the 2010 Symposium. The student must be the leading author and the presenter of the paper, and must indicate in the web submission form that this is a student paper in order to be considered for this award.

Paper Submission Deadline
17:00, January 14, 2009 (JST) / 00:00, January 14, 2009 (PST)

Prospective attendees can obtain further information and forms for registration and hotel reservations from the Symposium website by visiting or from the closest secretariat.

A one-day short course will be held on June 14, 2009. Details will be given in the VLSI Technology Symposium Advance Program, which will be issued toward the end of March, 2009.

2009 Silicon Nanoelectronics Workshop will be held on June 13-14, 2009 at the same location.

Following the first day of this Symposium, the 2009 Symposium on VLSI Circuits will be held at the same location with two days of overlap between the two symposia.

Secretariat for VLSI Symposia (Japan)
c/o ICS Convention Design, Inc.
Sumitomo Corp., Jinbocho Bldg.
3-24, Kanda-Nishikicho, Chiyoda-ku
Tokyo 101-8449, Japan
Tel: +81-3-3219-3541
Fax: +81-3-3219-3626
Secretariat for VLSI Symposia (USA)
Widerkehr and Associates
19803 Laurel Valley Place
Montgomery Village,
MD 20886, USA
Tel: +1-301-527-0900 ext.2
Fax: +1-301-527-0994

Call for papersTechnical ProgramShort CoursesCommitteesBest Student Paper Award
Best Student Paper AwardShort CoursesCall For PapersTechnical Programcommittees